Porous Silicon Fabry-Perot Sensor Fabrication
Abstract views: 107
/ 
PDF downloads: 110
DOI:
https://doi.org/10.59287/ijanser.559Keywords:
Porous Silicon, Sensor, Fabry-Perot, Crystal Sensor, Electrochemical EtchingAbstract
Porous silicon structures are widely used in gas sensor applications. The reason for this is that the gas holding capacity of the porous structure is quite high. In this study, mesoporous structures were obtained. It has been proven by studies that mesoporous structures are superior to other pore structures in gas retention and gas detection. In addition, fabry-perot structures were obtained by impact etching. SEM images and XPS results of fabry-perot porous structures were obtained.
Downloads
References
Karacali T., Alanyalioglu M., Efeoglu H., Single and Double Fabry–PÉrot Structure Based on Porous Silicon for Chemical Sensors, IEEE, December 2009, 1667 - 1672.
Hasar U. C., Ozbek I. Y., Oral E. A., Karacali T., and Efeoglu H., The effect of silicon loss and fabrication
tolerance on spectral properties of porous silicon Fabry-Perot cavities in sensing applications, OPTICS EXPRESS, 13 Sep 2012, 22208- 22223
Dongoing L., electrochemıcal ınvestıgatıon ınto porous sılıcon formatıon, national university of singapore, 2013.
