Porous Silicon Fabry-Perot Sensor Fabrication
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Keywords:Porous Silicon, Sensor, Fabry-Perot, Crystal Sensor, Electrochemical Etching
Porous silicon structures are widely used in gas sensor applications. The reason for this is that the gas holding capacity of the porous structure is quite high. In this study, mesoporous structures were obtained. It has been proven by studies that mesoporous structures are superior to other pore structures in gas retention and gas detection. In addition, fabry-perot structures were obtained by impact etching. SEM images and XPS results of fabry-perot porous structures were obtained.
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